Coupling device for coupling vibration systems

A micro-electro-mechanical component, preferably an inertial sensor, more preferably a rotation rate sensor for measuring a rotation of the rotation rate sensor, comprising:

• a coupling device for coupling a plurality of vibration systems, which are mounted above a substrate in such a manner that said systems can vibrate along a first direction (x) and are offset with respect to one another in a second direction (y) perpendicular to the first direction (x), wherein the coupling device has a bending beam spring which can bend in the first direction (x) and is connected to the vibration systems, and connections of the bending beam spring to the vibration systems are arranged between at least two connection points at the ends of the bending beam spring that connects the bending beam spring to the substrate in such a manner that a deflection of the bending beam spring which is caused by movements of the vibration systems results in a vibration of the bending beam spring with vibration antinodes in the area of the connections of the bending beam spring to the vibration systems;
• and
• a first vibration system and a second vibration system;
• wherein
• the coupling device is connected to the substrate at three connection points and is connected to the first vibration system between one pair of adjacent connection points and is connected to the second vibration system between the other pair of adjacent connection points
• the coupling device further includes first, second and third torsion spring elements;
• the first torsion spring element is arranged at a first end of the bending beam spring, the second torsion spring element is arranged at the center of the bending beam spring, and the third torsion spring element is arranged at a second end of the bending beam spring to the substrate;
• the first vibration system is connected to the bending beam spring midway between the first and second torsion spring elements, and the second vibration system is connected to the bending beam spring midway between the second and third torsion spring elements;
• and
• in the case of an opposite direction deflection of the first and second vibration systems along the first direction (x), a second mode of the bending beam spring forms as a first mode of the coupling device, thereby forcing the first and second vibration systems to move in parallel.

A micro-electro-mechanical component, preferably an inertial sensor, more preferably a rotation rate sensor for measuring a rotation of the rotation rate sensor, comprising:

• a coupling device for coupling a plurality of vibration systems, which are mounted above a substrate in such a manner that said systems can vibrate along a first direction (x) and are offset with respect to one another in a second direction (y) perpendicular to the first direction (x), wherein the coupling device has a bending beam spring which can bend in the first direction (x) and is connected to the vibration systems, and connections of the bending beam spring to the vibration systems are arranged between at least two connection points of the bending beam spring to the substrate in such a manner that a deflection of the bending beam spring which is caused by movements of the vibration systems results in a vibration of the bending beam spring with vibration antinodes in the area of the connections of the bending beam spring to the vibration systems;
• and
• a first vibration system and a second vibration system;
• wherein
• the coupling device is connected to the substrate at three connection points and is connected to the first vibration system between one pair of adjacent connection points and is connected to the second vibration system between the other pair of adjacent connection points
• the coupling device further includes first, second and third torsion spring elements each having a size of less than 1000 μm;
• the first torsion spring element is arranged at a first end of the bending beam spring, the second torsion spring element is arranged at the center of the bending beam spring, and the third torsion spring element is arranged at a second end of the bending beam spring to the substrate;
• the first vibration system is connected to the bending beam spring midway between the first and second torsion spring elements, and the second vibration system is connected to the bending beam spring midway between the second and third torsion spring elements;
• and
• in the case of an opposite direction deflection of the first and second vibration systems along the first direction (x), a second mode of the bending beam spring forms as a first mode of the coupling device, thereby forcing the first and second vibration systems to move in parallel.