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US 12,365,579 B2Granted
Distributed MEMS switch array design with multiple input/output ports
AssigneeMenlo Microsystems, Inc.
InventorsXu Zhu, Hajime Terazawa, Chris Nassar
Life of this patent
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AssigneeMenlo Microsystems, Inc.
InventorsXu Zhu, Hajime Terazawa, Chris Nassar
Estimating the term…
A micro-relay switch array may comprise an array of micro-relays disposed on a substrate, and a cap disposed over the array of micro-relays, thereby encapsulating the array of micro-relays. The micro-relay switch array may further comprise an array of through-substrate vias (TSVs) associated with the array of micro-relays, arranged such that columns of TSVs alternate with columns of micro-relays, and a plurality of device electrical conductors, each of which electrically couples one of the TSVs of the array of TSVs directly to at least two of the micro-relays. The micro-relay switch array may further comprise a plurality of TSV electrical conductors, each of which electrically couples at least two TSVs together. Each micro-relay of the array of micro-relays may be a micro-electromechanical system (MEMS) switch. The substrate and cap may be glass, and the TSVs may be through-glass vias.
A micro-relay switch array, comprising:
A micro-relay assembly, comprising:
A method of fabricating a micro-relay switch array, comprising:
Dependencies are inferred from the claim text.