Liquid ejection head inspection method, liquid ejection head inspection apparatus, and ejection element substrate
AssigneeCanon Kabushiki Kaisha
InventorsSatoru Takahashi, Junichiro Iri
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AssigneeCanon Kabushiki Kaisha
InventorsSatoru Takahashi, Junichiro Iri
Estimating the term…
Provided is a technique which can inspect liquid ejection energy without changing electric wiring on an ejection element substrate of a liquid ejection head or ejecting liquid from the liquid ejection head. A liquid ejection head as an ejection-energy inspection target includes an ejection element substrate having a substrate, a heat generation portion having an electrothermal converter on the substrate, a protective film covering the electrothermal converter, and an organic layer covering the electrothermal converter and the protective film. For this liquid ejection head, an electrical resistance value of the electrothermal converter is acquired as a first measurement result, and the film thickness of a film thickness measurement portion of the ejection element substrate where the protective film is exposed is acquired as a second measurement result. Further, information on ejection energy needed to eject liquid from the ejection port is obtained based on the first and second measurement results.
An inspection method for inspecting a liquid ejection head including an ejection element substrate which has a substrate, a heat generation portion having an electrothermal converter provided on a first surface of the substrate, a protective film covering the electrothermal converter, and an organic layer covering the electrothermal converter and the protective film, the ejection element substrate being capable of ejecting liquid in a flow channel formed between the organic layer and the protective film through an ejection port formed in the organic layer by using heat generated at the heat generation portion, the inspection method comprising:
An inspection apparatus for inspecting a liquid ejection head including an ejection element substrate which has a substrate, a heat generation portion having an electrothermal converter provided on a first surface of the substrate, a protective film covering the electrothermal converter, and an organic layer covering the electrothermal converter and the protective film, the ejection element substrate being capable of ejecting liquid in a flow channel formed between the organic layer and the protective film through an ejection port formed in the organic layer by using heat generated at the heat generation portion, the inspection apparatus comprising:
Dependencies are inferred from the claim text.