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US 12,362,137 B2Granted
Automated sample alignment for microscopy
AssigneeFEI Company
InventorsJohn Flanagan, Michael Strauss
Life of this patent
Estimating the term…
Abstract
Systems and methods for automated sample alignment for microscopy are described herein. In one aspect a method can include: rotating the sample along a first axis by each of a plurality of rotation angles; imaging, with a charged particle beam, the sample for each rotation angle; and determining a first rotation angle based on the image for each rotation angle, wherein the first rotation angle aligns the sample to the charged particle beam in relation to the first axis.
Claims20
A method for aligning a sample in a microscopy system, comprising:
- rotating the sample along a first axis by each of a plurality of rotation angles,
- imaging, with a charged particle beam, the sample for each rotation angle;
- determining a first rotation angle based on the image for each rotation angle, wherein the first rotation angle aligns the sample to the charged particle beam in relation to the first axis;
- and
- determining a second rotation angle based on the first rotation angle, wherein the second rotation angle aligns the sample to the charged particle beam in relation to a second axis, and wherein the second axis is orthogonal to the first axis.
2 more elements
A microscopy system comprising:
- a charged particle beam;
- a sample;
- and
- a controller configured to:
- rotate the sample along a first axis by each of a plurality of rotation angles;
- image, with the charged particle beam, the sample for the each of the plurality of rotation angles;
- determine a first rotation angle based on the image for the each of the plurality of rotation angles, wherein the first rotation angle aligns the sample to the charged particle beam in relation to the first axis;
- and
- determine a second rotation angle based on the first rotation angle, wherein the second rotation angle aligns the sample to the charged particle beam in relation to a second axis, and wherein the second axis is orthogonal to the first axis.
6 more elements
Dependencies are inferred from the claim text.