Poly(cyanocinnamate)s for structural and optical applications
AssigneeBrewer Science Inc.
InventorsTony D. Flaim, Gu Xu, Jennifer S. See
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Abstract
Methods of preparing poly(cyanocinnamate)s are provided, with those involving mild conditions and resulting in a soluble polymer that is stable at room temperature and can be coated onto microelectronic substrates. The polymer includes at least one bis(cyanoacetate) monomer and at least one aromatic dialdehyde monomer. The polymer exhibits good thermal and structural properties and high absorbance in the UV range.
Claims28
A method of patterning a laserable layer supported on a substrate, or on at least one optionally present intervening layer between said laserable layer and said substrate, wherein the laserable layer is formed from a composition comprising from about 5% by weight to about 40% by weight of a poly(cyanocinnamate), based on the weight of the composition taken as 100% by weight, and the method comprises one or both of:
- (1) exposing the laserable layer to laser energy so as to remove at least a portion of the laserable layer;
- or
- (2) contacting a mold having a pattern formed therein with said laserable layer so as to transfer said pattern to said laserable layer.
A structure comprising:
- a microelectronic substrate selected from the group consisting of silicon, SiGe, SiO2, Si3N4, SiON, aluminum, tungsten, tungsten silicide, gallium arsenide, germanium, tantalum, tantalum nitride, Ti3N4, hafnium, HfO2, ruthenium, indium phosphide, coral, black diamond, and glass substrates;
- and
- a laserable layer on said substrate, or on at least one optionally present intervening layer between said laserable layer and said substrate, said laserable layer:
- being formed from a composition comprising from about 5% by weight to about 40% by weight of a poly(cyanocinnamate), based on the weight of the composition taken as 100% by weight;
- having an upper surface and a lower surface, with the upper surface being remote from the microelectronic substrate and the lower surface being adjacent the microelectronic substrate;
- and
- comprising at least one opening formed therein, said at least one opening having an upper edge at said upper surface, there being laser ablation residue from said poly(cyanocinnamate) at, near, or both at and near said upper edge of said at least one opening.
A polymer comprising
- wherein:
- each R1 is individually chosen from hydrogen, alkyls, aryls, aryl ethers, alkylaryls, alkoxys, and halogens;
- and
- R2 is a divalent group.
Dependencies are inferred from the claim text.