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US 12,360,450 B2Granted
Resin, resist composition and method for producing resist pattern, and compound
AssigneeSumitomo Chemical Company, Limited
InventorsYuji Kita, Koji Ichikawa
Life of this patent
Estimating the term…
Abstract
Disclosed are a resin comprising a structural unit represented by formula (I), and a structural unit represented by formula (a1-1) and/or a structural unit represented by formula (a1-2), and a resist composition including this resin:
Claims26
A resin comprising:
- (i) a structural unit represented by formula (I),
- (ii) at least one structural unit selected from the group consisting of a structural unit represented by formula (a1-1) and a structural unit represented by formula (a1-2), and
- (iii) a structural unit represented by formula (a2-A),
- wherein the resin does not include an aromatic hydrocarbon group having more than 6 carbon atoms:
- wherein, in formula (I),
- R1 represents a hydrogen atom or a methyl group,
- X1 represents a single bond or —CO—O—* and * represents a bonding site to Ar1,
- X2 represents —CO—O—*, —O—*, —O—CO—*, —O—CO—(CH2)mm—O—* or —O—(CH2)nn—CO—O—* and * represents a bonding site to Ar2,
- mm and nn represent 0 or 1,
- Ar1 represents an aromatic hydrocarbon group having 6 carbon atoms which may have a substituent,
- Ar2 represents an aromatic hydrocarbon group having 6 carbon atoms which may have a substituent,
- R2 each independently represent a hydrogen atom or an acid-labile group, or two R2 may combine together to form a group having an acetal ring structure,
- n represents an integer of 2 or 3, a plurality of R2 may be the same or different from each other:
- wherein, in formula (a1-1) and formula (a1-2),
- La1 and La2 each independently represent —O— or *—O—(CH2)k1—CO—O—, k1 represents an integer of 1 to 7, and * represents a bonding site to —CO—,
- Ra4 and Ra5 each independently represent a hydrogen atom or a methyl group,
- Ra6 and Ra7 each independently represent an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group obtained by combining these groups,
- m1 represents an integer of 0 to 14,
- n1 represents an integer of 0 to 10, and
- n1′ represents an integer of 0 to 3, and
- wherein, in formula (a2-A),
- Ra50 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
- Ra51 represents a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group,
- Aa50 represents a single bond or * —Xa51-(Aa52-Xa52)nb—, and * represents a bonding site to carbon atoms to which —Ra50 is bonded,
- Aa52 represents an alkanediyl group having 1 to 6 carbon atoms,
- Xa51 and Xa52 each independently represent —O—, —CO—O— or —O—CO—,
- nb represents 0 or 1, and
- mb represents an integer of 0 to 4, and when mb is an integer of 2 or more, a plurality of Ra51 may be the same or different from each other.
25 more elements
A compound represented by formula (IA):
- wherein, in formula (IA),
- R1 represents a hydrogen atom or a methyl group,
- X1 represents a single bond or —CO—O—* and * represents a bonding site to Ar1,
- X2 represents —CO—O—*, —O—*, —O—CO—*, —O—CO—(CH2)mm—O—* or —O—(CH2)nn—CO—O—* and * represents a bonding site to the benzene ring,
- mm and nn represent 0 or 1,
- Ar1 represents an aromatic hydrocarbon group having 6 carbon atoms which may have a substituent,
- R3 and R4 each independently represent a hydrogen atom or an acid-labile group, or R3 and R4 may combine together to form a group having an acetal ring structure,
- R5 represents a halogen atom, an alkyl fluoride group having 1 to 6 carbon atoms, an unsubstituted alkyl group having 1 to 12 carbon atoms, alkylcarbonyl group having 2 to 12 carbon atoms or an alkylcarbonyloxy group having 2 to 11 carbon atoms, and
- n′ represents an integer of 1 to 3, and when n′ is 2 or more, a plurality of R5 may be the same or different from each other.
6 more elements
A resin comprising:
- (i) a structural unit represented by formula (I),
- (ii) at least one structural unit selected from the group consisting of a structural unit represented by formula (a1-1) and a structural unit represented by formula (a1-2), and
- (iii) a structural unit represented by formula (a2-A),
- wherein the resin does not include an aromatic hydrocarbon group having more than 6 carbon atoms:
- wherein, in formula (I),
- R1 represents a hydrogen atom or a methyl group,
- X1 represents a single bond or —CO—O—* and * represents a bonding site to Ar1,
- X2 represents —CO—O—*, —O—*, —O—CO—*, —O—CO—(CH2)mm—O—* or —O—(CH2)nn—CO—O—* and * represents a bonding site to Ar2,
- mm and nn represent 0 or 1,
- Ar1 represents an aromatic hydrocarbon group having 6 carbon atoms which may have a substituent,
- Ar2 represents an aromatic hydrocarbon group having 6 carbon atoms which may have a substituent,
- R2 each independently represent an acid-labile group, or when two or more R2 exist, two R2 may combine together to form a group having an acetal ring structure,
- n represents an integer of 1 to 3, and when n is an integer of 2 or more, a plurality of R2 may be the same or different from each other:
- wherein, in formula (a1-1) and formula (a1-2),
- La1 and La2 each independently represent —O— or *—O—(CH2)k1—CO—O—, k1 represents an integer of 1 to 7, and * represents a bonding site to —CO—,
- Ra4 and Ra5 each independently represent a hydrogen atom or a methyl group,
- Ra6 and Ra7 each independently represent an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group obtained by combining these groups,
- m1 represents an integer of 0 to 14,
- n1 represents an integer of 0 to 10, and
- n1′ represents an integer of 0 to 3, and
- wherein, in formula (a2-A),
- Ra50 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
- Ra51 represents a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group,
- Aa50 represents a single bond or * —Xa51-(Aa52-Xa52)nb—, and * represents a bonding site to carbon atoms to which —Ra50 is bonded,
- Aa52 represents an alkanediyl group having 1 to 6 carbon atoms,
- Xa51 and Xa52 each independently represent —O—, —CO—O— or —O—CO—,
- nb represents 0 or 1, and
- mb represents an integer of 0 to 4, and when mb is an integer of 2 or more, a plurality of Ra51 may be the same or different from each other.
25 more elements
Dependencies are inferred from the claim text.