Micromirror device and optical scanning device
AssigneeFUJIFILM Corporation
InventorsKeisuke Aoshima, Ko Okada
Life of this patent
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AssigneeFUJIFILM Corporation
InventorsKeisuke Aoshima, Ko Okada
Estimating the term…
The micromirror device includes: a movable portion having a mirror portion on which a reflecting surface for reflecting incident light is formed; a first support portion that is connected to the movable portion on a first axis located in a plane including the reflecting surface of the mirror portion in a stationary state, and that swingably supports the movable portion around the first axis; and a pair of first actuators that are connected to the first support portion and face each other across the first axis, each of which being a piezoelectric drive type first actuator that allows the movable portion to swing around the first axis, in which in a case where the movable portion swings around the first axis, at least a part of the first actuator swings around the first axis in a phase opposite to a phase of the movable portion, and assuming that a ratio of a rotation angle of the first actuator to a rotation angle of the movable portion is R, 0<R<1.00 is satisfied.
A micromirror device comprising:
Dependencies are inferred from the claim text.