US 12,359,971 B2 · Spectral measurement method, spectral measurement system, and broadband pulsed light source unit

Abstract

A new spectral measurement technique is provided which enables measurement even if the light to be measured exists for a very short period. In one embodiment, a broadband pulsed light wave whose wavelength shifts temporally and continuously in a pulse interferes with a light wave to be measured. The intensity at each wavelength of the light wave to be measured is obtained using a Fourier transform of the output signal from a detector that has detected the intensity of the wave resulting from the interference. A laser beam from a laser source is converted to a supercontinuum wave by a nonlinear optical element, and a pulse extension element extends pulses of the supercontinuum wave, thus generating the broadband pulsed light wave.

Claims14

Dependent claims

A spectral measurement system, comprising

a broadband pulsed light source unit for emitting broadband pulsed light where each wavelength is in one-to-one correlation with each elapsed time in a pulse as a result of temporal shift of wavelength,
an element disposed at a position to interfere a light wave to be measured with a wave of the broadband pulsed light from the broadband pulsed light source unit, the light wave to be measured being emitted from an object not irradiated with broadband pulsed light, the light wave to be measured not being emitted from the broadband pulsed light source unit,
a detector for detecting the intensity of a wave resultant from the interference by the element, and
a processing unit for obtaining the spectral intensity of the light wave to be measured on the basis of an output signal from by the detector.

1 more element

A spectral measurement system, comprising

a broadband pulsed light source unit having an emission characteristic where each of emission wavelengths is in one-to-one correlation with each elapsed time in a pulse as a result of temporal shift of wavelength,
an element disposed at a position on a path of a light wave to be measured, the broadband pulsed light source unit being directed to the element to make an emitted broadband pulsed light wave interfere with the light wave to be measured on the element, the light wave to be measured being emitted from an object not irradiated with broadband pulsed light, the light wave to be measured not being emitted from the broadband pulsed light source unit,
a detector for detecting the intensity of a wave resultant from the interference by the element, and
a processing unit including a processor and a processing program executable by the processor, the processing program including a code for obtaining the spectral intensity of the light wave to be measured on the basis of an output signal from by the detector.

1 more element

Dependencies are inferred from the claim text.

Spectral measurement method, spectral measurement system, and broadband pulsed light source unit

Life of this patent

Spectral measurement method, spectral measurement system, and broadband pulsed light source unit

Life of this patent

Abstract

Claims14