Three-dimensional measurement device

A three-dimensional measurement device, comprising:

• an optical system:
• comprises an optical device that splits an incident light into two split lights,
• irradiates a measurement object with a measurement light that is at least part of one of the two split lights,
• irradiates a reference plane with a reference light that is at least part of another of the two split lights, and
• combines at least part of the measurement light reflected by the measurement object with at least part of the reference light reflected by the reference plane to emit a combined light;
• a first light emitter that emits a first light that has a first wavelength and enters a first input portion of the optical device, wherein
• the measurement object is irradiated with a first measurement light and the reference plane is irradiated with a first reference light once the first light enters the first input portion;
• a second light emitter that emits a second light that has a second wavelength and enters a second input portion of the optical device, wherein
• the measurement object is irradiated with a second measurement light and the reference plane is irradiated with a second reference light once the second light enters the second input portion;
• a first imaging device that takes an image of an output light that is output from a first output portion of the optical device once the first light enters the first input portion, and obtains first image data;
• a second imaging device that takes an image of an output light that is output from a second output portion of the optical device once the second light enters the second input portion, and obtains second image data;
• and
• a control device that executes three-dimensional measurement of the measurement object, based on the first and second image data obtained by the first imaging device and by the second imaging device, wherein
• the optical device and the first and second light emitters are disposed such that:
• a traveling direction of the first measurement light output from the optical device and directed to the measurement object is different from a traveling direction of the second measurement light output from the optical device and directed to the measurement object,
• a traveling direction of the first reference light output from the optical device and directed to the reference plane is different from a traveling direction of the second reference light output from the optical device and directed to the reference plane,
• a traveling direction of the first measurement light reflected by the measurement object and directed to the optical device is different from a traveling direction of the second measurement light reflected by the measurement object and directed to the optical device, and
• a traveling direction of the first reference light reflected by the reference plane and directed to the optical device is different from a traveling direction of the second reference light reflected by the reference plane and directed to the optical device, wherein
• the optical device is configured to:
• combine part of the first measurement light reflected by the measurement object with part of the first reference light reflected by the reference plane to emit a combined light from the first output portion, and
• combine part of the second measurement light reflected by the measurement object with part of the second reference light reflected by the reference plane to emit a combined light from the second output portion.