Vacuum pump with reduced seal requirements
AssigneeEdwards Limited
InventorsCainan Long, Nigel Paul Schofield, Alan Ernest Kinnaird Holbrook
Life of this patent
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AssigneeEdwards Limited
InventorsCainan Long, Nigel Paul Schofield, Alan Ernest Kinnaird Holbrook
Estimating the term…
The present disclosure relates to vacuum pump 10 comprising a substantially hermetically sealed enclosure 40, a core pump assembly located within the enclosure 40, and an inert purge gas inlet 70 fluidly connected to the enclosure 40 for supplying inert purge gas to an interior of the enclosure 40 surrounding the core pump assembly. By providing a sealed enclosure 40 around the core pump assembly and supplying inert purge gas thereto via the inlet 70, an inert positive pressure can be applied to the core pump assembly that reduces leakage of process gas from the core pump assembly such that seals therein can be removed or reduced. In particular, the need for elastomer seals that may be expensive and not be suited to high temperature or corrosive process gas conditions can be removed.
A vacuum pump comprising:
Dependencies are inferred from the claim text.