Method and system for coating a metal workpiece with graphene

A method for coating a metal workpiece with graphene by means of chemical vapor deposition, comprising:

• exposing the metal workpiece to a carbon-containing precursor gas and a hydrogen gas in a processing chamber in a first phase;
• and
• exposing the metal workpiece to the carbon-containing precursor gas, the hydrogen gas and a first carrier gas in the processing chamber in a second phase after the first phase;
• wherein a first flow rate of the carbon-containing precursor gas into the processing chamber in the first phase is higher than a second flow rate of the carbon-containing precursor gas into the processing chamber in the second phase;
• wherein a first flow rate of the hydrogen gas into the processing chamber in the first phase is higher than a second flow rate of the hydrogen gas into the processing chamber in the second phase;
• and
• wherein a first total gas pressure in the processing chamber in the first phase is lower than a second total gas pressure in the processing chamber in the second phase.