Lifting device for lowering a substrate

A lifting device for lowering a substrate onto a substrate carrier and for lifting off the substrate from the substrate carrier in a process chamber, the lifting device comprising:

• a lifting rod:
• a lifting rod linear drive configured to move the lifting rod to and fro along a linear lifting movement path;
• a plurality of adjustment screws configured to adjust a position of the lifting movement path;
• a drive housing for the lifting rod linear drive, the drive housing including a drive housing flange and a passage opening surrounded by the drive housing flange;
• the lifting rod is guided through the passage opening;
• the adjustment screws are each screwed through a respective adjustment screw receiving opening in the drive housing flange, and the adjustment screw receiving openings are arranged spaced apart from one another in the drive housing flange;
• and
• a protrusion of the respective adjustment screw over the drive housing flange on a mounting side of the drive housing flange opposite the drive housing is adjustable by screwing the respective adjustment screw through the respective adjustment screw receiving opening to differing depths.