Infrared sensor using carbon nanotubes and method for manufacturing same
AssigneeNEC Corporation
InventorsRyota Yuge, Kaoru Narita, Tomo Tanaka
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AssigneeNEC Corporation
InventorsRyota Yuge, Kaoru Narita, Tomo Tanaka
Estimating the term…
An object of the present invention is to provide an infrared sensor having a high TCR value, and a method for manufacturing the infrared sensor. The infrared sensor comprises a substrate, a first electrode on the substrate, a second electrode spaced from the first electrode on the substrate, and a carbon nanotube layer electrically connected with the first electrode and the second electrode, wherein the carbon nanotube layer comprises semiconducting carbon nanotubes in an amount more than 66% by mass based on the total amount of carbon nanotubes and 60% or more of the carbon nanotubes contained in the carbon nanotube layer have a diameter within a range of 0.6 to 1.5 nm and a length within a range of 100 nm to 5 μm.
A bolometer-type infrared sensor comprising:
Dependencies are inferred from the claim text.