Acoustic wave device with mass loading strip having tapered sidewall
AssigneeSkyworks Solutions, Inc.
InventorsYumi Torazawa, Yuya Hiramatsu, Rei Goto, Hironori Fukuhara
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Abstract
Aspects of this disclosure relate to an acoustic wave device with transverse mode suppression. The acoustic wave device can include a piezoelectric layer, an interdigital transducer electrode, a temperature compensation layer, and a mass loading strip. The mass loading strip can overlap edge portions of fingers of the interdigital transducer electrode. The mass loading strip can have a sidewall that is tapered inwardly from a bottom side of the mass loading strip to a top side of the mass loading strip. The top side can be shorter than the bottom side.
Claims20
An acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode including a bus bar and fingers extending from the bus bar, the fingers each including an edge portion and a body portion;
- a temperature compensation layer over the interdigital transducer electrode;
- and
- a mass loading strip having a bottom side, an top side, and a sidewall extending between the bottom side and the top side, the top side being shorter than the bottom side, the sidewall tapered inwardly from the bottom side to the top side, the mass loading strip overlapping the edge portions of the fingers, a portion of the temperature compensation layer being positioned between the mass loading strip and the piezoelectric layer.
An acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode including a bus bar and fingers extending from the bus bar, the fingers each including an edge portion and a body portion;
- a temperature compensation layer over the interdigital transducer electrode;
- and
- a mass loading strip having a bottom side, an top side, and a sidewall extending between the bottom side and the top side, the top side being shorter than the bottom side, an angle between the bottom side and the sidewall being at least 10 degrees and less than 90 degrees, the mass loading strip overlapping the edge portions of the fingers, a portion of the temperature compensation layer being positioned between the mass loading strip and the piezoelectric layer.
An acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode including a bus bar and fingers extending from the bus bar, the fingers each including an edge portion and a body portion;
- a temperature compensation layer over the interdigital transducer electrode;
- and
- a mass loading strip having a bottom side, an top side, and a sidewall extending between the bottom side and the top side, the sidewall shaped so as to mitigate formation of a void in the temperature compensation layer along the sidewall, the top side being shorter than the bottom side, the mass loading strip overlapping the edge portions of the fingers, a portion of the temperature compensation layer being positioned between the mass loading strip and the piezoelectric layer.
Dependencies are inferred from the claim text.