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US 12,355,212 B2Granted
Semiconductor lasers and processes for the planarization of semiconductor lasers
AssigneeMACOM Technology Solutions Holdings, Inc.
InventorsAli Badar Alamin Dow, Jason Daniel Bowker, Malcolm R. Green
Life of this patent
Estimating the term…
Abstract
A laser structure may include a substrate, an active region arranged on the substrate, and a waveguide arranged on the active region. The waveguide may include a first surface and a second surface that join to form a first angle relative to the active region. A material may be deposited on the first surface and the second surface of the waveguide.
Claims20
A laser structure, comprising:
- a substrate;
- an active region over the substrate;
- a semiconductor layer over the active region, the semiconductor layer comprising a dovetail waveguide, the dovetail waveguide comprising a central top waveguide surface;
- a metal layer extending over the semiconductor layer and contacting the central top waveguide surface a first air gap under the metal layer at a first side of the dovetail waveguide and a second air gap under the metal layer at a second side of the dovetail waveguide;
- and
- an insulating layer over the semiconductor layer, under the metal layer, under the first air gap at the first side of the dovetail waveguide, and under the second air gap at the second side of the dovetail waveguide.
3 more elements
A laser structure, comprising:
- a substrate;
- an active region over the substrate;
- a semiconductor layer over the active region, the semiconductor layer comprising a waveguide, the waveguide comprising a central top waveguide surface;
- a metal layer extending over the semiconductor layer and contacting the central top waveguide surface a first air gap under the metal layer at a first side of the waveguide and a second air gap under the metal layer at a second side of the waveguide;
- and
- an insulating layer over the semiconductor layer, under the metal layer, under the first air gap at the first side of the waveguide, and under the second air gap at the second side of the waveguide.
3 more elements
Dependencies are inferred from the claim text.