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US 12,354,900 B2Granted
Ceramic material having high resistivity and high corrosion resistance, and wafer placement table
AssigneeNGK Insulators, Ltd.
InventorsAkiyoshi Hattori, Koji Ueda, Hitoshi Nishio, Tomohisa Mizoguchi
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Abstract
A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %.
Claims8
A ceramic material that has a high resistivity and high corrosion resistance, the ceramic material comprising:
- a magnesium-aluminum oxynitride phase as a main phase,
- wherein the ceramic material has a carbon content of 0.005 to 0.275 mass %.
Dependencies are inferred from the claim text.