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US 12,354,895 B2Granted
Encapsulated RFID in consumable chamber parts
AssigneeLam Research Corporation
InventorsGordon Peng, Yu Jiang, David Celli, Steve Askin
Life of this patent
Estimating the term…
Abstract
A consumable part and methods for tracking the consumable part includes embedding a radio frequency tag within a pocket created on a side of the consumable part that faces away from a process region defined within a process chamber of the processing tool and covering an opening of the pocket using a plug. The plug is laser fused along an interface formed between sidewalls of the plug and sidewalls of the pocket.
Claims13
A consumable part for use in a process chamber used to process a wafer, the consumable part comprising:
- a pocket defined on an underside surface of the consumable part that is facing away from a process region so as to leave the consumable part of at least a defined thickness between a bottom surface of the pocket and a top surface of the consumable part exposed to the process region, the pocket extending to a first depth and having an opening on the underside surface;
- a radio frequency tag disposed inside the pocket, the radio frequency tag is configured to generate a high frequency signal, when activated;
- and
- a plug covering the opening and extending to a second depth over the radio frequency tag, the second depth defined to leave a space between a bottom surface of the plug and a top surface of the radio frequency tag within the pocket, the plug is made of same material as the consumable part and is laser fused seal the radio frequency tag in the pocket, said laser fusion is performed along an interface defined between sidewalls of the plug and sidewalls of the pocket.
1 more element
Dependencies are inferred from the claim text.