Plasma generating device

A plasma generating system, comprising:

• a dielectric tube providing a space for inducing a plasma;
• a power supply configured to provide a power;
• and
• an antenna module coupled to the dielectric tube and configured to induce the plasma by receiving the power from the power supply;
• wherein
• the antenna module includes:
• a multi-layer coil structure including a first end, a second end, and a first coil structure to an Nth coil structure electrically interposed between the first end and the second end, wherein Nis a natural number greater than or equal to 2,
• at least one first terminal capacitor electrically connected between the first end and a first terminal of the power supply, and
• at least one second terminal capacitor electrically connected between the second end and a second terminal of the power supply,
• each of the first coil structure to the Nth coil structure includes two or more turns, the two or more turns comprise an innermost turn and an outermost turn, the innermost turn of the first coil structure is at the first end, and the outermost turn of the Nth coil structure is at the second end,
• the first coil structure to the Nth coil structure are on respective first to Nth planes, and the first to Nth planes are parallel to but different from each other,
• the multi-layer coil structure further includes a first inter-layer capacitor to a Mth inter-layer capacitor, wherein the first coil structure to the Nth coil structure and the first inter-layer capacitor to the Mth inter-layer capacitor alternate in series such that the first inter-layer capacitor is electrically connected between the first coil structure and the second coil structure, and so on until the Mth inter-layer capacitor is electrically connected between the N−1th coil structure and the Nth coil structure, and M is equal to N−1;
• the first terminal capacitor has a first capacitance and the second terminal capacitor has a second capacitance,
• the first capacitance is greater than the second capacitance,
• each of the first inter-layer capacitor to the Mth inter-layer capacitor have a third capacitance, and
• a sum of (i) a reciprocal of the first capacitance and (ii) a reciprocal of the second capacitance has a same value as a reciprocal of the third capacitance, such that, when the antenna module receives the power, an absolute value of an electric potential with respect to ground minimal on the innermost turn of the two or more turns in each of the first coil structure to the Nth coil structure.