Silicon-containing composition and method of producing semiconductor substrate
AssigneeJsr Corporation
InventorsRyuichi Serizawa, Kengo Hirasawa
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Abstract
A silicon-containing composition includes a polysiloxane compound and solvent. The polysiloxane compound includes a fluorine atom and a group including an ester bond. The polysiloxane compound preferably includes a first structural unit represented by formula (1), and a second structural unit represented by formula (2). X represents a monovalent organic group having 1 to 20 carbon atoms and comprising a fluorine atom; R1 represents a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms; Y represents a monovalent organic group having 1 to 20 carbon atoms and comprising an ester bond; and R2 represents a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms.
Claims19
A silicon-containing composition comprising:
- a polysiloxane compound comprising a first structural unit represented by formula (1), and a second structural unit represented by formula (2);
- and
- a solvent:
- wherein,
- in the formula (1), X represents an aromatic hydrocarbon group having 1 to 20 carbon atoms and comprising a substituent which comprises a fluorine atom;
- a is an integer of 1 to 3, wherein in a case in which a is no less than 2, a plurality of Xs are identical or different from each other;
- R1 represents a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms;
- and b is an integer of 0 to 2, wherein in a case in which b is 2, two R1s are identical or different from each other, and wherein a sum of a and b is no greater than 3, and
- in the formula (2), Y represents a monovalent organic group having 1 to 20 carbon atoms and represented by formula (3-1), formula (3-3), or formula (3-4);
- c is an integer of 1 to 3, wherein in a case in which c is no less than 2, a plurality of Ys are identical or different from each other;
- R2 represents a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms;
- and d is an integer of 0 to 2, wherein in a case in which d is 2, two R2s are identical or different from each other, and wherein a sum of c and d is no greater than 3:
- wherein, in the formula (3-1), L1 represents a single bond, a divalent hydrocarbon group having 1 to 10 carbon atoms, or a group in which a heteroatom is included between adjacent carbon atoms of a divalent hydrocarbon group having 1 to 10 carbon atoms;
- R3 represents a monovalent hydrocarbon group having 1 to 10 carbon atoms;
- and * denotes a site bonding to the silicon atom in the formula (2),
- *-L3-R5 (3-3)
- in the formula (3-3), L3 represents a single bond or a divalent linking group;
- R5 represents a monovalent group having a lactone structure;
- and * denotes a site bonding to the silicon atom in the formula (2),
- *-L4-R6 (3-4)
- in the formula (3-4), L4 represents a single bond or a divalent linking group;
- R6 represents a monovalent group having a cyclic carbonate structure;
- and * denotes a site bonding to the silicon atom in the formula (2).
Dependencies are inferred from the claim text.