Biofunctionalized three-dimensional (3D) graphene-based field-effect transistor (FET) sensor

A biological field-effect transistor (BioFET) associated with detecting a presence of an analyte in an environment, the BioFET comprising:

• source and drain regions formed in a substrate;
• an insulating layer disposed on a surface of the substrate;
• a gate disposed on the insulating layer and configured to control a current between the source and drain regions;
• a well region containing an electrolyte solution configured to retain the analyte;
• a three-dimensional (3D) graphene layer forming a channel region within the well region between the source and drain regions, the 3D graphene layer biofunctionalized with a biological material configured to change an electric charge distribution of the 3D graphene layer in response to the biological material selectively binding with the analyte;
• and
• a passivation layer configured to prevent the electrolyte solution from contacting the source and drain regions, wherein the selective binding of the analyte to the biological material is associated with a change in one or more of a current flow, a conductivity, or an impedance of the 3D graphene layer.