US 12,352,306 B2 · Workpiece support for a thermal processing system

Abstract

A workpiece support for a thermal processing system is provided. The workpiece support includes a rotor configured to support a workpiece. The workpiece support further includes a gas supply. The gas supply can include a plurality of bearing pads. Each of the bearing pads can be positioned closer to a periphery of the rotor than a center of the rotor. Each of the bearing define one or more passages configured to direct gas onto the rotor to control a position of the rotor along a first axis and a second axis that is substantially perpendicular to the first axis. Furthermore, one or more of the bearing pads define at least one additional passage configured to direct gas onto the rotor to control rotation of the rotor about the first axis.

Claims15

Dependent claims

A workpiece support for a thermal processing system, the workpiece support comprising:

a rotor configured to support a workpiece;
a gas supply comprising a plurality of bearing pads, each of the bearing pads positioned closer to a periphery of the rotor than a center of the rotor, and a first passage extending along a first axis, the first passage configured to direct gas onto the rotorto control the position of the rotor along the first axis;
a second passage extending along a second axis, the second passage configured to direct gas onto the rotor to control the position of the rotor along the second axis;
a third passage configured to direct gas onto the rotor to accelerate rotation of the rotor about the first axis;
and a fourth passage configured to direct gas onto the rotor to decelerate rotation of the rotor about the first axis.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/550,148Filed 14 Dec 2021 · us provisional application

Priority

28 Dec 2020

Published

US 2022/0205478 A130 Jun 2022

Granted

8 Jul 2025

Term ends

Not estimatedThe source records don’t support an estimate.

Classification12 codes

F16C 17/03
For radial load only: with tiltably-supported segments, e.g. Michell bearings
F16C 32/0622
The gas being supplied under pressure, e.g. aerostatic bearings: via nozzles, restrictors
F16C 32/0666
Details of hydrostatic bearings independent of fluid supply or direction of load: of bearing pads
F16C 32/0696
Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load: for both radial and…

Workpiece support for a thermal processing system

Life of this patent

Workpiece support for a thermal processing system

Life of this patent

Abstract

Claims15