Targeted temporal ALD

A targeted temporal ALD (Atomic Layer Deposition) device comprising:

• an ALD head, the ALD head comprising:
• (i) an outer housing, the outer housing comprising:
• a top of the outer housing, and
• an outer chamber body wall that surrounds and defines a perimeter of an outer chamber that is encompassed within the outer housing, the outer chamber body wall extending away from the top of the outer housing to a terminating end of the outer chamber body wall;
• (ii) an inner housing positioned within the outer housing, the inner housing comprising:
• a top of the inner housing, and
• an inner chamber body wall that surrounds and defines a perimeter of an inner chamber that is encompassed within the inner housing, the inner chamber body wall extending away from the top of the inner housing to a terminating end of the inner housing, wherein a space between the inner chamber body wall and the outer chamber body wall defines at least a portion of the outer chamber, wherein the space between the inner chamber body wall and the outer chamber body wall that defines at least the portion of the outer chamber surrounds the inner chamber body wall;
• (iii) a first set of one or more ports for enabling fluid communication between the inner housing and at least one precursor gas source, the first set of one or more ports being formed through both the outer housing and the inner housing, bypassing the outer chamber, for enabling the at least one precursor gas to flow into and out of the inner chamber during use, while bypassing the outer chamber, each port of the first set of one or more ports being in fluid communication with the inner chamber, the inner chamber defined by a space between the inner chamber body walls and between the terminating ends of the inner chamber body walls and the first set of one or more ports that open into the inner chamber;
• and
• (iv) a second set of one or more ports formed through the outer housing, without being formed through the inner housing, for enabling fluid communication between at least one inert gas source and the space between the inner chamber body wall and the outer chamber body wall that defines at least the portion of the outer chamber and that surrounds the inner chamber body wall during use.