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US 12,350,609 B2Granted
Pre-wet system having pneumatic circulation
AssigneeHermes-Epitek Corporation
InventorsJui-Hsiung Hsu, Chi-Yi Lin, Yu-Liang Huang, Jih-Jenn Huang
Life of this patent
Estimating the term…
Abstract
In some embodiments, a system for pre-wetting a filter includes a filter, a piping system, a first gas, a second gas, a first buffer tank, and a second buffer tank. The first gas drives the solvent to clean the filter. The two buffer tanks store the solvent discharged from the filter. The second gas selectively drives the solvent in the first buffer tank to return to the filter and then to be discharged into the second buffer tank. Alternatively, the second gas selectively drives the solvent in the second buffer tank to return to the filter and then to be discharged into the first buffer tank.
Claims10
A pre-wet system, comprising:
- a piping system;
- a storage tank containing a solvent;
- a filter connected to the piping system;
- a first gas for driving the solvent in the storage tank to the filter via the piping system;
- a first buffer tank connected to the filter via the piping system to store the solvent discharged from the filter;
- a second buffer tank connected to the filter via the piping system to store the solvent discharged through the filter;
- a second gas for selectively driving the solvent in the first buffer tank to return to the filter and then to be discharged to the second buffer tank via the piping system, or the second gas selectively driving the solvent in the second buffer tank to return to the filter and then to be discharged to the first buffer tank via the piping system;
- and
- a control system that determines a path of the solvent wherein the first buffer tank further comprises:
- a high-level sensor connected to the control system;
- and a low-level sensor connected to the control system;
- wherein:
- when the high-level sensor detects that the solvent in the first buffer tank reaches a high level, the second gas drives the solvent in the first buffer tank to return to the filter and then to be discharged to the second buffer tank via the piping system;
- when the low-level sensor detects that the solvent in the first buffer tank reaches a low level, the second gas drives the solvent in the second buffer tank to return to the filter and then to be discharged to the first buffer tank via the piping system.
11 more elements
A pre-wet system, comprising:
- a piping system;
- a storage tank containing a solvent;
- a plurality of filters connected to the piping system;
- a first gas for driving the solvent in the storage tank to each of the plurality of filters via the piping system;
- a first buffer tank connected to each of the plurality of filters via the piping system to store the solvent discharged from each of the plurality of filters;
- a second buffer tank connected to each of the plurality of filters via the piping system to store the solvent discharged through each of the plurality of filters;
- a second gas for selectively driving the solvent in the first buffer tank to return to each of the plurality of filters and then to be discharged to the second buffer tank via the piping system, or the second gas selectively driving the solvent in the second buffer tank to return to each of the plurality of filters and then to be discharged to the first buffer tank via the piping system;
- and
- a control system that determines a path of the solvent wherein the second buffer tank further comprises:
- a high-level sensor connected to the control system;
- and a low-level sensor connected to the control system;
- wherein:
- when the high-level sensor detects that the solvent in the second buffer tank reaches a high level, the second gas drives the solvent in the second buffer tank to return to the filter and then to be discharged to the first buffer tank via the piping system;
- when the low-level sensor detects that the solvent in the second buffer tank reaches a low level, the second gas drives the solvent in the first buffer tank to return to the filter and then to be discharged to second buffer tank via the piping system.
11 more elements
Dependencies are inferred from the claim text.