Liquid processing apparatus and liquid processing method

A liquid processing apparatus comprising:

• a stage on which a substrate is placed;
• a cup configured to surround the substrate placed on the stage;
• a nozzle configured to supply a processing liquid to the substrate to perform processing;
• an exhaust port provided in a bottom portion of the cup to exhaust an interior of the cup;
• an annular body provided inside the cup to surround the substrate in a plan view and configured to form a flow path for a gas flowing into the cup from an opening of the cup;
• a lifting mechanism configured to raise or lower the annular body relative to the cup to perform a switching between a first state in which the annular body is located at a first relative height and a first exhaust is performed through a first flow path that allows the gas to flow from a central side of the cup into the exhaust port and a second state in which the annular body is located at a second relative height and a second exhaust is performed through a second flow path that allows the gas to flow from an outer-peripheral-side of the cup into the exhaust port;
• and
• a first drainage port open to the first flow path and a second drainage port open to the second flow path,
• wherein a protrusion is formed on the bottom portion of the cup, and the exhaust port opens in a top portion of the protrusion,
• wherein the protrusion has a width that is reduced upward so that a side surface of the protrusion on the central side of the cup and a side surface of the protrusion on the outer-peripheral-side of the cup form a first inclined surface and a second inclined surface, respectively,
• wherein the first relative height is a position at which the annular body is located higher than the second relative height with respect to the cup,
• wherein the annular body has a first extension portion and a second extension portion which extend downward toward the central side and the outer-peripheral-side of the cup, respectively, and
• wherein the first inclined surface and the first extension portion form the first flow path, and the second inclined surface and the second extension portion form the second flow path.