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US 12,346,033 B2Granted
Optical system
AssigneeCarl Zeiss SMT GmbH
InventorsRolf Freimann, Juergen Baier, Steffen Fritzsche
Life of this patent
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Abstract
The disclosure provides an optical system, having a first optical control loop, which is set up to regulate a position and/or spatial orientation of a first optical element relative to a first module sensor frame, and a first module control loop, which is set up to regulate a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame. Related components and methods are also provided.
Claims21
An optical system, comprising:
- a first module, comprising:
- a first mirror;
- a first modular sensor frame;
- a first sensor configured to capture a position and/or a spatial orientation of the first mirror relative to the first modular sensor frame;
- and
- a first actuator configured to position and/or orient the first mirror;
- a second module, comprising:
- a second mirror;
- a second modular sensor frame;
- a second sensor configured to capture a position and/or a spatial orientation of the second mirror relative to the second modular sensor frame;
- and
- a second actuator configured to position and/or orient the second mirror;
- a force frame connected to the first and second modules so that the first and second modules are removable from the optical system;
- a sensor frame decoupled from the force frame;
- a third sensor configured to capture a position and/or spatial orientation of the first modular sensor frame relative to the sensor frame;
- a fourth sensor configured to capture a position and/or spatial orientation of the second modular sensor frame relative to the sensor frame;
- a first optical control loop configured to regulate a position and/or a spatial orientation of the first mirror relative to the first modular sensor frame;
- and
- a second optical control loop configured to regulate a position and/or a spatial orientation of the second mirror relative to the second modular sensor frame,
- wherein:
- the force frame encloses a volume;
- and
- the sensor frame is at least partially arranged within the volume.
20 more elements
Dependencies are inferred from the claim text.