Laser crystallization apparatus
AssigneeSamsung Display Co., Ltd.
InventorsDong Eon Lim, Jeong Un Go, Hyun Jin Kim, Hoon Chul Ryoo, Yeong Jin Seol, Gil Yong On, Yeon Hak Lee, Hye Ji Cho
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AssigneeSamsung Display Co., Ltd.
InventorsDong Eon Lim, Jeong Un Go, Hyun Jin Kim, Hoon Chul Ryoo, Yeong Jin Seol, Gil Yong On, Yeon Hak Lee, Hye Ji Cho
Estimating the term…
A laser crystallization apparatus includes a plurality of laser generators which generate a plurality of laser beams, a plurality of attenuators which adjust energy intensity of the plurality of laser generators, and an optical module which overlap outputs of the plurality of attenuators to output a line beam. A first attenuator of the plurality of attenuators attenuates the energy intensity of the corresponding laser beam, and a second attenuator of the plurality of attenuators maintains the energy intensity of the corresponding laser beam.
A laser crystallization apparatus, comprising:
A laser crystallization apparatus, comprising:
Dependencies are inferred from the claim text.