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US 12,345,760 B2Granted
Apparatus for probing device-under-test
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChuan-Hsiang Sun, Bo-You Chen, Chi-Chang Lai, Hsiou-Yu He, Peiwei Lin
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Abstract
An apparatus for probing a device-under-test (DUT) includes a fixture, a circuitry film attached to the fixture, a probing tip disposed on and electrically coupled to the circuitry film to probe a device-under-test, and a first signal connector disposed on the circuitry film and electrically coupled to the probing tip through the circuitry film. The first signal connector is oriented in a direction that is angularly offset from a lengthwise direction of the probing tip.
Claims20
An apparatus, comprising:
- a fixture comprising an upper portion and a lower portion connected to the upper portion, the upper portion comprising a sidewall extending in a first direction, a lower surface extending in a second direction different from the first direction, and a curved bottom edge connecting the sidewall to the lower surface;
- a circuitry film attached to the fixture, the circuitry film being bended to substantially fit the sidewall and the curved bottom edge of the upper portion of the fixture;
- a probing tip disposed on and electrically coupled to the circuitry film to probe a device-under-test, and the probing tip extending in the first direction;
- and
- a first signal connector disposed on a portion of the circuitry film attached to the sidewall of the upper portion of the fixture, the first signal connector being electrically coupled to the probing tip through the circuitry film, the first signal connector being oriented in the second direction.
2 more elements
An apparatus, comprising:
- a fixture comprising a base and a protrusion connected to the base;
- a circuitry film comprising a first portion extending along a sidewall of the base, a second portion extending along a lower surface of the base, a first turning segment connected to the first portion and the second portion, a third portion extending along a sidewall of the protrusion, a second turning segment connected to the second portion and the third portion, a fourth portion extending along a lower surface of the protrusion, and a third turning segment connected to the third portion and the fourth portion;
- a probing tip disposed on the fourth portion of the circuitry film and electrically coupled to the circuitry film, the probing top extending vertically toward a device-under-test;
- and
- a first signal connector disposed on the first portion of the circuitry film and electrically coupled to the probing tip through the circuitry film, the first signal connector extending horizontally toward the fixture.
2 more elements
An apparatus, comprising:
- a fixture comprising an upper portion and the lower portion;
- a circuitry film attached to the fixture, and the circuitry film extending along a sidewall of the upper portion of the fixture, a bottom surface of the upper portion of the fixture, a sidewall of the lower portion of the fixture connected to the bottom surface of the upper portion, and a bottom surface of the lower portion of the fixture connected to the sidewall of the lower portion;
- a circuit board disposed below the upper portion of the fixture, the lower portion of the fixture passing through the circuit board, and a top surface of the circuit board being between the bottom surface of the upper portion of the fixture and the bottom surface of the lower portion of the fixture;
- probing tips disposed on and electrically coupled to the circuitry film to probe a device-under-test;
- and
- signal connectors disposed on and electrically coupled to the circuitry film, one of the signal connectors landing on the top surface of the circuit board, and another one of the signal connectors extending toward a direction different from the one of the signal connectors.
3 more elements
Dependencies are inferred from the claim text.