Gas component detection device with poisoning suppression
AssigneeMurata Manufacturing Co., Ltd.
InventorsHideki Ishida, Takao Tsuda
Life of this patent
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Abstract
A gas component detection device includes a column, a sensor, a flow path, and a flow path switch. The column separates a component of gas to be detected. The sensor is, for example, a semiconductor sensor, is connected to the downstream side of the column, and detects a component of gas to be detected. The flow path connects the column and the sensor. The flow path switch is arranged between a flow path and a flow path. The flow path switch switches between and executes a measurement mode in which gas to be detected discharged from the column flows into the sensor, and a discharge mode in which gas to be detected discharged from the column is discharged to the outside.
Claims20
A gas component detection device comprising:
- a column configured to separate a component of gas to be detected;
- a sensor connected to a downstream side of the column and configured to detect the component of the gas to be detected;
- a downstream flow path connecting the column and the sensor;
- and
- a flow path switch arranged in the downstream flow path,
- wherein:
- the flow path switch configured to switch between and execute a measurement mode in which the gas to be detected discharged from the column is caused to flow into the sensor, a discharge mode in which the gas to be detected discharged from the column is discharged to outside, and a backflow mode in which an outside gas is caused to flow back from the downstream flow path in a manner passing through the column so that the column is cleaned,
- the flow path switch includes a valve or a blower having a straightening function, and
- the gas to be detected is released to outside and the downstream flow path of the gas to be detected to the sensor is blocked as the valve or the blower is controlled by a control unit at the discharge mode.
A gas component detection device comprising:
- a column configured to separate a component of gas to be detected;
- a sensor connected to a downstream side of the column and configured to detect the component of the gas to be detected;
- a downstream flow path connecting the column and the sensor;
- and
- a flow path switch arranged in the downstream flow path,
- wherein:
- the flow path switch is configured to switch between and execute a measurement mode in which the gas to be detected discharged from the column is caused to flow into the sensor, a discharge mode in which the gas to be detected discharged from the column is discharged to outside, and a backflow mode in which an outside gas is caused to flow back from the downstream flow path in a manner passing through the column so that the column is cleaned;
- the flow path switch includes a valve or a blower having a straightening function;
- and
- the discharge mode and the backflow mode are switched as the valve or the blower is controlled by a control unit.
Dependencies are inferred from the claim text.