Multi-functional shutter disk for thin film deposition chamber
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWen-Hao Cheng, Yen-Yu Chen, Yi-Ming Dai
Life of this patent
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Abstract
The present disclosure provides a multifunction chamber having a multifunctional shutter disk. The shutter disk includes a lamp device, a DC/RF power device, and a gas line on one surface of the shutter disk. With this configuration, simplifying the chamber type is possible as the various specific, dedicated chambers such as a degas chamber, a pre-clean chamber, a CVD/PVD chamber are not required. By using the multifunctional shutter disk, the degassing function and the pre-cleaning function are provided within a single chamber. Accordingly, a separate degas chamber and a pre-clean chamber are no longer required and the overall transfer time between chambers is reduced or eliminated.
Claims20
A film deposition chamber, comprising:
- an electrode;
- a holder configured to hold a workpiece;
- and
- a shutter disk overlying the holder, the shutter disk including:
- a first side and a second side, the first side of the shutter disk facing the holder;
- and
- a thermal energy source on the first side of the shutter disk,
- wherein the shutter disk has a circular shape with a first radius, the first side including an inner circular area having a second radius and an outer ring area occupying an area outside of the second radius of the inner circular area and within the first radius of the shutter disk.
A film deposition chamber, comprising:
- an electrode;
- a holder configured to hold a workpiece;
- and
- a shutter disk overlying the holder, the shutter disk having a first surface and a second surface, comprising:
- a lamp module on the first surface of the shutter disk;
- and
- a power module adjacent to the lamp module on the first surface,
- wherein the first surface including:
- an inner circle having a first radius, the lamp module occupying at least a portion of the inner circle;
- and
- an outer circle concentric with the inner circle, the outer circle having a second radius greater than the first radius, the power module occupying at least a portion of an area between the outer circle and the inner circle.
A film deposition chamber, comprising:
- an electrode;
- a holder configured to hold a workpiece;
- and
- a shutter disk overlying the holder, the shutter disk comprising:
- a first surface of the shutter disk;
- a lamp module on the first surface of the shutter disk;
- and
- a power module adjacent to the lamp module on the first surface,
- wherein the first surface includes:
- a first section occupied by the lamp module;
- and
- a second section adjacent to the first section occupied by the power module.
Dependencies are inferred from the claim text.