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US 12,341,487 B2Granted
Multilayer piezoelectric substrate for acoustic wave device
AssigneeSkyworks Solutions, Inc.
InventorsRei Goto, Keiichi Maki, Gong Bin Tang
Life of this patent
Estimating the term…
Abstract
A surface acoustic wave device has a piezoelectric substrate having a cut angle (e.g., the piezoelectric angle is cut so as to have a crystal orientation) that allows the surface acoustic wave device to operate as a longitudinally leaky surface acoustic wave device that confines the acoustic wave energy within the piezoelectric substrate and that has less propagation attenuation and a higher electromechanical coupling coefficient k2.
Claims20
A surface acoustic wave device comprising:
- an interdigital transducer electrode including a plurality of fingers;
- a piezoelectric layer of lithium niobate disposed below the interdigital transducer electrode, the piezoelectric layer having a cut angle defined by first, second and third Euler angles (ϕ1, θ1, ψ1) so that the second Euler angle θ1 has a value of about 76<θ1<86 degrees, the piezoelectric layer having a height H1 with a value of about 0.3 L<H1<0.9 L, where L is a pitch between the plurality of fingers of the interdigital transducer electrode;
- and
- a support substrate layer disposed below the piezoelectric layer.
1 more element
A radio frequency module comprising:
- a package substrate;
- a surface acoustic wave resonator configured to filter a radio frequency signal, the surface acoustic wave resonator including an interdigital transducer electrode including a plurality of fingers, a piezoelectric layer of lithium niobate disposed below the interdigital transducer electrode, the piezoelectric layer having a cut angle defined by first, second and third Euler angles (ϕ1, θ1, ψ1) so that the second Euler angle θ1 has a value of about 76<θ1<86 degrees, and a support substrate layer disposed below the piezoelectric layer, the piezoelectric layer having a height H1 with a value of about 0.3 L<H1<0.9 L, where L is a pitch between the plurality of fingers of the interdigital transducer electrode;
- and
- additional circuitry, the surface acoustic wave resonator and additional circuitry disposed on the package substrate.
1 more element
A wireless communication device comprising:
- an antenna;
- and
- a front end module including one or more surface acoustic wave resonators configured to filter a radio frequency signal associated with the antenna, each surface of the one or more acoustic wave resonators including an interdigital transducer electrode including a plurality of fingers, a piezoelectric layer of lithium niobate disposed below the interdigital transducer electrode, the piezoelectric layer having a cut angle defined by first, second and third Euler angles (ϕ1, θ1, ψ1) so that the second Euler angle θ1 has a value of about 76<θ1<86 degrees, and a support substrate layer disposed below the piezoelectric layer, the piezoelectric layer having a height H1 with a value of about 0.3 L<H1<0.9 L, where L is a pitch between the plurality of fingers of the interdigital transducer electrode.
Dependencies are inferred from the claim text.