Method for depositing target material in deposition chamber with tiltable workpiece holder

A method, comprising:

• supporting a workpiece on a workpiece holder within a material deposition chamber;
• rotating the workpiece holder;
• tilting the workpiece holder in response to an output of a determination circuit;
• controlling a temperature of the workpiece utilizing a heater on a surface of the workpiece holder, the heater including a first heating coil, a second heating coil and a third heating coil, wherein the first heating coil has a first end and a second end opposite to the first end and the first heating coil continuously extends between the first end and the second end, the second heating coil extends between the first end and the second end of the first heating coil, and the third heating coil extends between the first end and the second end of the first heating coil;
• and
• depositing a material on the workpiece.

A method, comprising:

• supporting a workpiece on a workpiece holder within a material deposition chamber;
• rotating the workpiece holder;
• tilting the workpiece holder to a first angle in response to an output of a determination circuit;
• depositing material on the workpiece while the workpiece holder is tilted at the first angle;
• tilting the workpiece holder to a second angle in response to an output of the determination circuit;
• depositing material on the workpiece while the workpiece holder is tilted at the second angle;
• and
• controlling a temperature of the workpiece while the workpiece holder is tilted at the first angle and the second angle,
• wherein the controlling the temperature of the workpiece includes:
• providing thermal energy to the workpiece from a first surface of a heater on a circular support region of the workpiece holder,
• wherein the heater has first, second, and third heating coils on the first surface, and
• wherein the first heating coil heats a first zone of the first surface, the second heating coil heats a second zone of the first surface, and the third heating coil heats a third zone of the first surface.