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US 12,340,988 B2Granted
Ring carrier and substrate treating system
AssigneeSemes Co., Ltd.
InventorsMun Gi Jung, Duk Hyun Son
Life of this patent
Estimating the term…
Abstract
Disclosed is a ring carrier used for transferring a ring member. The ring carrier includes a body having a plate shape, and a guide part protruding from an upper surface of the body to face an inner periphery of the ring member, and an alignment hole used when the ring carrier is aligned is formed in the body to pass through the body.
Claims20
A ring carrier for transferring a ring member, the ring carrier comprising:
- a body having a plate shape and an alignment hole, wherein the alignment hole passes through the body;
- and
- a guide part protruding from an upper surface of the body to face an inner periphery of the ring member,
- wherein the alignment hole passing through the body is configured to align the ring carrier in a predetermined direction.
1 more element
A substrate treating system comprising:
- a first chamber provided with a transfer robot having a transfer hand;
- a second chamber connected to the first chamber;
- a ring carrier supporting a ring member during a time when the ring member is transferred between the first chamber and the second chamber;
- and
- an alignment unit attached to the first chamber and configured to rotate the ring carrier to a predetermined direction,
- wherein the ring carrier includes:
- a body having a disk shape;
- a guide boss configured to prevent the ring member positioned on the body of the ring carrier from sliding during a time when the ring member is transferred between the first chamber and the second chamber;
- and
- an alignment hole passing through the body, and
- wherein the alignment unit is configured to rotate the ring carrier such that the alignment hole of the ring carrier is aligned to the predetermined direction.
8 more elements
A substrate treating system comprising:
- an index chamber provided with a transfer robot, wherein an interior of the index chamber is maintained at an atmospheric pressure;
- a process chamber configured to treat a substrate by using plasma;
- a load lock chamber disposed between the index chamber and the process chamber, wherein an interior of the load lock chamber is at one of the atmospheric pressure and a vacuum pressure lower than the atmospheric pressure;
- a ring carrier configured to transfer a ring member among the process chamber, the load lock chamber, and the index chamber;
- and
- a controller,
- wherein the controller controls the transfer robot such that a hand of the transfer robot transfers the ring carrier positioned on the ring member between the load lock chamber and the index chamber,
- wherein the ring carrier includes:
- a body having a disk shape;
- a guide part protruding from an upper surface of the body to face a flat zone of the ring member;
- and
- an alignment hole passing through the body, and
- wherein the ring carrier is aligned to a predetermined direction using the alignment hole.
10 more elements
Dependencies are inferred from the claim text.