Edge couplers with a fine-alignment mechanism
AssigneeGlobalFoundries U.S. Inc.
InventorsBartlomiej Jan Pawlak, Oscar D. Restrepo, Koushik Ramachandran, Yusheng Bian, Eduardo Cruz Silva
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Abstract
Structures including an edge coupler and methods of forming such structures. The structure comprises a dielectric layer on a semiconductor substrate. The dielectric layer includes a cavity and an edge defining a boundary of the cavity. The structure further comprises an edge coupler including a waveguide core. The waveguide core includes a portion that extends past the edge of the dielectric layer and overhangs the cavity. The structure further comprises a heater positioned adjacent to the portion of the waveguide core. The heater is spaced by a gap from the portion of the waveguide core.
Claims20
A structure comprising:
- a semiconductor substrate;
- a first dielectric layer on the semiconductor substrate, the first dielectric layer including a first cavity and an edge defining a boundary of the first cavity;
- an edge coupler including a waveguide core, the waveguide core including an undercut portion that extends past the edge of the first dielectric layer and overhangs the first cavity, and the undercut portion including a bottom surface that adjoins the first cavity;
- and
- a first heater positioned adjacent to the undercut portion of the waveguide core, the first heater spaced by a first gap from the undercut portion of the waveguide core.
A method comprising:
- forming a cavity in a dielectric layer that is disposed on a semiconductor substrate, wherein the dielectric layer includes an edge defining a boundary of the cavity;
- forming an edge coupler including a waveguide core, wherein the waveguide core includes an undercut portion that extends past the edge of the dielectric layer and overhangs the cavity, and the undercut portion includes a bottom surface that adjoins the cavity;
- and
- forming a heater positioned in a lateral direction adjacent to the undercut portion of the waveguide core, wherein the heater is spaced by a gap from the undercut portion of the waveguide core.
Dependencies are inferred from the claim text.