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US 12,339,468 B2Granted
Lens structure and manufacturing method thereof
AssigneeKorea Advanced Institute of Science and Technology
InventorsKi-Hun Jeong, Sangin Bae
Life of this patent
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Abstract
Provided are a lens structure capable of increasing a light absorbance and reducing optical crosstalk by manufacturing a multilayered aperture having a form of a metal layer-dielectric layer-metal layer stacked in a vertical direction and pore patterns formed on both metal layers as an aperture of a microlens array, and a manufacturing method thereof.
Claims9
A lens structure comprising:
- a multilayered aperture having a form of a metal layer-dielectric layer-metal layer stacked in a vertical direction and having pore patterns formed on both metal layers;
- and
- a microlens array provided on one side surface of the multilayered aperture,
- wherein the multilayered aperture includes:
- a first metal layer having a first pore pattern;
- a dielectric layer disposed on the first metal layer;
- and
- a second metal layer disposed on the dielectric layer and having a second pore pattern aligned with the first pore pattern in a row,
- wherein the microlens array is formed to include a plurality of microlenses provided on each pore of the second metal layer,
- wherein
- the first metal layer is formed on a substrate, and
- the first metal layer has a thickness smaller than that of the second metal layer, and
- wherein
- the first metal layer has the thickness of 1 to 20 nm,
- the dielectric layer has a thickness of 50 to 300 nm, and
- the second metal layer has the thickness of 100 nm or more.
13 more elements
A lens structure comprising:
- a multilayered aperture having a form of a metal layer-dielectric layer-metal layer stacked in a vertical direction and having pore patterns formed on both metal layers;
- and
- a microlens array provided on one side surface of the multilayered aperture,
- wherein the multilayered aperture includes:
- a first metal layer having a first pore pattern;
- a dielectric layer disposed on the first metal layer;
- and
- a second metal layer disposed on the dielectric layer and having a second pore pattern aligned with the first pore pattern in a row,
- wherein the microlens array is formed to include a plurality of microlenses provided on each pore of the second metal layer,
- wherein
- the first metal layer is formed on a substrate, and
- the second metal layer has a thickness smaller than that of the first metal layer.
9 more elements
Dependencies are inferred from the claim text.