US 12,339,421 B2 · Anti-reflective optical coatings and methods of forming the same

Abstract

According to at least one feature of the present disclosure, a method of forming a film of an optical element, includes: positioning a substantially transparent lens in a reactor chamber, wherein the lens defines a curved surface; exposing the lens to a first precursor comprising one of lanthanum or gadolinium such that the first precursor is deposited on the curved surface of the lens; exposing the first precursor on the curved surface to a first oxidizer such that the first precursor present on the curved surface of the lens reacts with the first oxidizer to form a high refractive index layer of the film; exposing the high refractive index layer to a second precursor such that the second precursor is deposited on the high refractive index layer; and exposing the second precursor on the high refractive index layer to a second oxidizer such that the second precursor present on the high refractive index layer reacts with the second oxidizer to form a low refractive index layer of the film.

Claims14

Dependent claims

An optical element, comprising:

an optically transparent lens defining a curved surface, wherein the optically transparent lens comprises a refractive index in the range from about 1.45 to about 1.55 at a wavelength of about 266 nm;
and
a film positioned on the curved surface, the film comprising:
a first layer of hafnium oxide (HfO2) positioned on the curved surface,
a second layer of aluminum fluoride (AlF3) positioned on the first layer, and
a third layer of silicon dioxide (SiO2) positioned on the second layer.

3 more elements

Dependencies are inferred from the claim text.

Anti-reflective optical coatings and methods of forming the same

Life of this patent

Anti-reflective optical coatings and methods of forming the same

Life of this patent

Abstract

Claims14