Semiconductor device and method of failure analysis for semiconductor device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShih-Wei Peng, Wei-Cheng Lin, Jiann-Tyng Tzeng
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShih-Wei Peng, Wei-Cheng Lin, Jiann-Tyng Tzeng
Estimating the term…
The present disclosure provides a semiconductor device. The semiconductor device includes: a first cell, a dielectric layer, and a snorkel structure. The first cell has an output terminal. The dielectric layer is disposed on the first cell. The snorkel structure is disposed in the dielectric layer. The snorkel structure includes a first conductive structure, a first conductive layer, and a second conductive structure. The first conductive layer is electrically connected to the output terminal of the cell. The first conductive layer is disposed on and electrically connected to the first conductive structure. The second conductive structure is disposed on and electrically connected to the first conductive layer. The second conductive structure has a topmost conductive layer buried in the dielectric layer.
A semiconductor device, comprising:
A semiconductor device, comprising:
A method comprising:
Dependencies are inferred from the claim text.