Inspection device and inspection method

An inspection method, comprising:

• irradiating an inspection object with inspection light emitted by a light source including a phosphor;
• and
• detecting, using a photodetector, reflected light of the inspection light reflected by the inspection object, wherein
• a spectral distribution of the inspection light has at least one local maximum spectral intensity value derived from fluorescence emitted by the phosphor,
• there are two local maximum spectral intensity values within a wavelength range of 500 nm or more and less than or equal to 1000 nm,
• a maximum spectral intensity value is within a wavelength range of 600 nm or more and less than or equal to 750 nm, and
• when a spectral intensity value Pmax equals the maximum spectral intensity value, a largest value of the spectral intensity in a wavelength range longer than 750 nm is within a range of 20% or more of Pmax and less than or equal to 100% of Pmax, and
• the spectral intensity value within a wavelength range of 500 nm or more and less than or equal to 550 nm is less than 20% of Pmax.