Material handling system and monitoring system and monitoring method for particles in traveling area of overhead hoist transfers
AssigneeChangxin Memory Technologies, Inc.
InventorYuanzhang Qin
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AssigneeChangxin Memory Technologies, Inc.
InventorYuanzhang Qin
Estimating the term…
The present application discloses a material handling system and a monitoring system and a monitoring method for particles in a traveling area of overhead hoist transfers, wherein the monitoring system for particles in the overhead hoist transfer traveling area comprises gas sampling modules, a particle counter and a monitoring device. The gas sampling module is configured to obtain the gas to be tested around traveling wheels of each overhead hoist transfer (OHT). The particle counter is configured to test the gas to be tested for the size and number of particles in the gas to be tested. The monitoring device is electrically connected to the particle counter, and is configured to acquire the size and number of the particles tested and alarm when determining that the content of particles does not meet a preset standard.
A monitoring system for particles in a traveling area of overhead hoist transfers, comprising:
A monitoring method for particles in a traveling area of overhead hoist transfers, comprising following steps of:
Dependencies are inferred from the claim text.