Pressure sensor including a pressure sensor chip to detect a differential pressure with high accuracy

A pressure sensor chip, comprising:

• a first insulating layer including a first cavity and a second cavity, and being electrically insulated;
• a second insulating layer including a third cavity and a fourth cavity, and being electrically insulated;
• a first conductive layer between the first insulating layer and the second insulating layer;
• a second conductive layer joined to the first insulating layer on an opposite side from the first conductive layer;
• a third conductive layer joined to the second insulating layer on an opposite side from the first conductive layer;
• a first flow path through which the first cavity and the fourth cavity communicate with each other;
• a second flow path through which the second cavity and the third cavity communicate with each other;
• a first communication portion through which at least one of the first cavity and the fourth cavity communicates externally;
• and
• a second communication portion through which at least one of the second cavity and the third cavity communicates externally;
• wherein
• the first conductive layer includes:
• a first diaphragm between the first cavity and the third cavity;
• and
• a second diaphragm between the second cavity and the fourth cavity;
• the second conductive layer includes:
• a first electrode facing the first diaphragm with the first cavity interposed therebetween;
• and
• a second electrode facing the second diaphragm with the second cavity interposed therebetween;
• and
• the third conductive layer includes:
• a third electrode facing the first diaphragm with the third cavity interposed therebetween;
• and
• a fourth electrode facing the second diaphragm with the fourth cavity interposed therebetween.