Multiple disk pad conditioner

A method of conditioning a polishing pad, comprising:

• conditioning the polishing pad using a multiple disk pad conditioner, wherein:
• the multiple disk pad conditioner comprises a conditioning arm for carrying a plurality of pad conditioning head bases,
• each conditioning head base comprising a pivot arm,
• each pivot arm comprising a plurality of pad conditioning heads
• each of the plurality of conditioning heads has a conditioning disk affixed thereto,
• each of the plurality of conditioning head bases comprise a rotational axis,
• each of the rotational axes is disposed a distance apart in a first direction that extends along a length of the conditioning arm, and
• conditioning the polishing pad comprises urging the plurality of pad conditioning heads against a surface of a polishing pad.

A polishing system, comprising:

• a plurality of polishing modules, each comprising:
• a carrier support module comprising a carrier platform, and one or more carrier assemblies comprising one or more corresponding carrier heads which are suspended from the carrier platform;
• a carrier loading station for transferring substrates to and from the one or more carrier heads;
• a polishing station comprising a polishing platen, wherein the carrier support module is positioned to move the one or more carrier assemblies between a substrate polishing position disposed above the polishing platen and a substrate transfer position disposed above the carrier loading station;
• and
• a multiple disk pad conditioner having a plurality of conditioning head bases attached to a conditioning arm and disposed a distance apart in a first direction that extends along a length of the conditioning arm;
• wherein:
• each conditioning head base comprises a pivot arm;
• each pivot arm comprises a plurality of conditioning heads;
• and
• each of the plurality of conditioning heads has a conditioning disk affixed thereto.