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US 12,336,195 B2Granted
Trench capacitor device for superconducting electronic circuit and superconducting qubit device
AssigneeImec Vzw
InventorAnton Potocnik
Life of this patent
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Abstract
The disclosure relates to a trench capacitor device for a superconducting electronic circuit. The trench capacitor device includes a substrate, a first capacitor electrode, and a second capacitor electrode, each electrode including a superconductor and extending into the substrate. The first electrode is circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode.
Claims17
A trench capacitor device comprising:
- a substrate;
- a first electrode comprising a superconductor and extending into the substrate, wherein the first electrode is arranged in a first trench extending into the substrate from a first side towards a second side of the substrate;
- and
- a second electrode comprising a superconductor and extending into the substrate, the first electrode being circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode, wherein the second electrode is arranged in a second trench extending into the substrate from the second side towards the first side.
1 more element
A superconducting qubit device comprising:
- a trench capacitor device comprising:
- a substrate;
- a first electrode comprising a superconductor and extending into the substrate;
- and
- a second electrode comprising a superconductor and extending into the substrate, the first electrode being circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode;
- and
- a Josephson junction connected between the first electrode and the second electrode of the trench capacitor device.
4 more elements
Dependencies are inferred from the claim text.