Visible light source including integrated VCSELs and integrated photonic cavities
AssigneeMeta Platforms Technologies, LLC
InventorsZhimin Shi, Maik Andre Scheller, Gareth Valentine, James Ronald Bonar
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Abstract
A visible light source includes a substrate, a first reflector and a second reflector configured to reflect infrared light and arranged vertically to form a vertical cavity on the substrate, an active region in the vertical cavity and configured to emit infrared light, a micro-resonator on the substrate and configured to receive the infrared light emitted by the active region and generate visible light through optical parametric oscillation, and an output coupler configured to couple the visible light generated in the micro-resonator out of the micro-resonator.
Claims20
A visible light source comprising:
- a substrate;
- a first reflector and a second reflector on the substrate, wherein the first reflector and the second reflector are configured to reflect infrared light and are arranged to form a cavity in a direction perpendicular to the substrate;
- an active region in the cavity, the active region configured to emit infrared light;
- a micro-resonator in a layer above the active region in the direction perpendicular to the substrate, the micro-resonator including a resonator that is formed using a nonlinear material and is configured to receive the infrared light emitted by the active region and generate visible light through optical parametric oscillation in the resonator;
- and
- an output coupler configured to couple the visible light generated in the micro-resonator out of the micro-resonator.
A visible light source array comprising:
- a complementary metal-oxide semiconductor (CMOS) backplane including drive circuits formed thereon;
- and
- an array of visible light sources bonded to the CMOS backplane directly or indirectly, wherein each visible light source in the array of visible light sources is individually addressable by the drive circuits and comprises:
- a first reflector and a second reflector configured to reflect infrared light and form a cavity in a direction perpendicular to the CMOS backplane;
- an active region in the cavity and configured to emit infrared light;
- a micro-resonator in a layer above the active region in the direction perpendicular to the CMOS backplane, the micro-resonator including a resonator that is formed using a nonlinear material, is configured to resonate in a plane perpendicular to a length direction of the cavity, and is configured to receive the infrared light emitted by the active region and generate visible light through optical parametric oscillation in the resonator;
- and
- an output coupler configured to couple the visible light generated in the micro-resonator out of the micro-resonator.
Dependencies are inferred from the claim text.