Dark field illumination based on laser illuminated phosphor
AssigneeCamtek Ltd.
InventorsAmnon Menachem, Yuval Weissler, Zehava Ben Ezer
Life of this patent
Estimating the term…
Abstract
An illumination module may include a laser diode array configured to emit laser radiation; a phosphor illumination unit that is configured to emit phosphor radiation following an exposure to the laser radiation; a multiple-angle illumination unit; and intermediate optics that is configured to convey the phosphor radiation to the multiple-angle illumination unit. The multiple-angle illumination unit is configured to receive the phosphor radiation and to dark field illuminate a region of a sample wafer from multiple angles during inspection of the wafer.
Claims20
An illumination module, comprising:
- a laser diode array configured to emit laser radiation;
- a phosphor illumination unit that is configured to emit phosphor radiation following an exposure to the laser radiation;
- a multiple-angle illumination unit;
- and intermediate optics that is configured to convey the phosphor radiation to the multiple-angle illumination unit;
- and
- wherein the multiple-angle illumination unit is configured to receive the phosphor radiation and to dark field illuminate a region of a sample wafer from multiple angles during inspection of the wafer.
A method for dark field illuminating a sample wafer with phosphor radiation, the method comprises:
- emitting laser radiation by a laser diode array;
- emitting phosphor radiation by a phosphor illumination unit, following an exposure to the laser radiation;
- conveying, by intermediate optics, the phosphor radiation to a multiple-angle illumination unit;
- and
- dark field illuminating a region of the sample wafer from multiple angles with the phosphor radiation during a wafer inspection.
Dependencies are inferred from the claim text.