Method for adjusting laser path of terahertz near-field system

A method for adjusting laser path of terahertz near-field system, wherein the position of a laser spot on a probe cantilever can be directly observed and determined by the shadow magnification projection method, and the laser optical path can be quickly adjusted, characterized in that the method comprises the following steps:

• step 1, adjusting the position of laser device to roughly adjust the emitted laser;
• step 2, adjusting the position of laser device to fine-tune the emitted laser;
• step 3, using a spot position detector to adjust the received laser;
• wherein a specific implementation method of step 1 is that:
• observing with naked eyes the laser emitted by the laser device to the vicinity of the probe, adjusting a position adjustment knob of the laser device, and observing through an optical microscope so that the laser is located on a substrate with a width of 2 millimeters at a root of the probe;
• observing the laser spot at the root through the optical microscope, adjusting the position adjustment knob of the laser device, so that the spot on the substrate is located at the root center of the probe, then adjusting the position adjustment knob of the laser device to move the laser toward the probe cantilever, and observing through the optical microscope whether the maximum light intensity point of the laser spot is at the center of the probe;
• wherein a specific implementation method of step 2 is that:
• observing the laser spot under the projection magnification method, observing the magnified shadow of the laser spot on a position plane more than 5 cm away from the lower end of the probe, the shadow magnification method is to use the laser to the 100-micron spot on the probe, magnify it on a 5-cm position plane, magnify the shadow of the spot by 30-50 times to form a 3-5 mm spot, and clearly observe the relative position of the spot and the probe, the laser spot adjusted by step 1 is located near the probe, and when observe under the projection magnification method, the adjusted spot and the probe are located at the center of the spot, where the center of the spot is the point with the maximum light intensity;
• if the spot is not in the center of the probe, but near the probe, fine-tune the position adjustment knob of the laser device to move the spot toward the probe, and observe the projection of the spot and the probe on the plane 5 cm below the probe, the shadow part blocked by the probe is located at the center of the spot, so that the maximum light intensity point of the spot is already at the center of the back of the probe;
• wherein the specific implementation method of step 3 is that:
• observing with the naked eye the laser reflected by the probe reaching the spot position detector, and observing, so that a SUM value of the spot detector is maximized, and a red dot position in a laser spot window is in the center of the window.