Dual resolution spectrometer, and spectrometric measurement apparatus and method using the spectrometer

A spectrometric measurement apparatus comprising:

• a light source emitting broadband light;
• an illumination optical system directing the broadband light from the light source to be incident on a measurement target;
• an imaging optical system emitting light reflected from the measurement target to a dual resolution spectrometer;
• and
• the dual resolution spectrometer dispersing light from the imaging optical system according to wavelength of the light from the imaging optical system and directing the dispersed light into two wavelength regions to detect the dispersed light in the two wavelength regions with different resolutions from each other,
• wherein the dual resolution spectrometer solely directs light in a first wavelength region to a second mirror and solely directs light in a second wavelength region to a third mirror, the second wavelength region does not overlap the first wavelength region.

A spectrometric measurement method comprising:

• emitting broadband light from a light source;
• directing the broadband light to be incident on a measurement target by using an illumination optical system;
• emitting light reflected from the measurement target through an imaging optical system;
• and
• dispersing light from the imaging optical system according to wavelength of the light from the imaging optical system by using a dual resolution spectrometer and directing the dispersed light into two wavelength regions to detect the dispersed light in the two wavelength regions with different resolutions from each other,
• wherein light in a first wavelength region is solely directed to a second mirror and light in a second wavelength region is solely directed to a third mirror, the second wavelength region does not overlap the first wavelength region.