Pump, chemical liquid supplying unit, and substrate treating apparatus

A chemical liquid supply pump, comprising:

• a tube including a pump chamber communicating with a chemical liquid inlet and a chemical liquid outlet, and configured to discharge a chemical liquid through a change in volume due to contraction and expansion;
• and
• a ball screw contracting or expanding the tube in a longitudinal direction of the tube,
• wherein the tube includes:
• a flexible tube body including a pump chamber which has an increased radius when the tube is contracted in the longitudinal direction and has a decreased radius when the tube is expanded in the longitudinal direction, and which has a jar shape of which a radius is increased from the chemical liquid inlet to a center of the pump chamber, and the radius is decreased from the center of the pump chamber to the chemical liquid outlet;
• a first flange provided at one end of the tube body and including the chemical liquid inlet;
• a second flange provided at an other end of the tube body and including the chemical liquid outlet;
• and
• a fixed baffle, attached to the tube body, and including a plate that protrudes from an inner edge of the chemical liquid outlet and curves toward the chemical liquid inlet to enhance a circulation of the chemical liquid in the pump chamber.

A chemical liquid supplying apparatus, comprising:

• a pump for supplying a chemical liquid to a nozzle that discharges the chemical liquid to a substrate;
• a trap tank in which the chemical liquid to be supplied from the pump to the nozzle is temporarily stored;
• a bottle containing the chemical liquid stored in the trap tank;
• and
• a filter provided on a path through which the chemical liquid is supplied from the trap tank to the pump,
• wherein the pump includes:
• a ball screw;
• a tube including a pump chamber communicating with a chemical liquid inlet and a chemical liquid outlet, and configured to discharge the chemical liquid while being contracted and expanded in a longitudinal direction by the ball screw,
• wherein, when the tube is contracted in the longitudinal direction by the ball screw, a radius of the pump chamber is increased, and when the tube is expanded in the longitudinal direction, the radius of the pump chamber is decreased;
• and
• a fixed baffle including a plate that protrudes from an inner edge of the chemical liquid outlet and curves toward the chemical liquid inlet to enhance a circulation of the chemical liquid in the pump chamber.