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US 12,330,933 B2Granted
Cantilever structure with intermediate substrate connection having a film with on anchor with protrusion
AssigneexMEMS Labs, Inc.
InventorsJye Ren, Jemm Yue Liang, Wen-Chien Chen
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Abstract
A cantilever structure includes an anchor portion and a film structure. The film structure covers over a cavity and vibrates within the cavity. A length of the film structure is less than a width of the film structure. The anchor portion includes at least one protrusion protruding toward the cavity, and the film structure is anchored on the anchor portion with the at least one protrusion.
Claims21
A cantilever structure, comprising:
- an anchor portion;
- and
- a film structure;
- wherein the film structure covers over a cavity and vibrates within the cavity;
- wherein a length of the film structure is less than a width of the film structure;
- wherein the anchor portion comprises at least one protrusion protruding toward the cavity in a top view and in a cross-sectional view, and the film structure is anchored on the anchor portion with the at least one protrusion;
- wherein the anchor portion comprises a blocky part, the at least one protrusion protrudes from the blocky part toward the cavity, and the film structure is directly connected to the blocky part and the at least one protrusion in the top view.
4 more elements
A device, comprising:
- a first cantilever structure comprising a first film structure anchored on an anchor portion;
- and
- a second cantilever structure comprising a second film structure anchored on the anchor portion;
- wherein a cavity is formed within the device;
- wherein the first film structure and the second film structure cover over the cavity and vibrate within the cavity;
- wherein a length of the first film structure is less than a width of the first film structure, and a length of the second film structure is less than a width of the second film structure;
- wherein the anchor portion comprises a plurality of protrusions protruding toward the cavity, and the first film structure and the second film structure are anchored on the anchor portion with the plurality of protrusions;
- wherein the first film structure is adjacent and opposite to the second film structure.
5 more elements
Dependencies are inferred from the claim text.