POD cleaning device
AssigneeSti Co., Ltd.
InventorsYoung Soo Park, Dong Geun Hur, Ki Man Lee
Life of this patent
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AssigneeSti Co., Ltd.
InventorsYoung Soo Park, Dong Geun Hur, Ki Man Lee
Estimating the term…
Proposed is A POD cleaning apparatus including: a separate unit separating a POD introduced through an introducing inlet; a first transportation unit transporting a separation POD resulting from the separation in the separation unit; a plurality of cleaning chambers in each of which the separation POD transported by the first transportation unit is cleaned and dried; a chamber in which the separation POD dried in the cleaning chamber is vacuum-processed; a second transportation transporting the separation dried in the cleaning chamber to the vacuum chamber; and an assembly unit assembling the vacuum-processed separation PODs, in which each of the plurality of cleaning chambers includes: a cleaning sub-chamber where the separation POD transported by the first transportation unit is accommodated and cleaned; and a drying chamber where the separation POD transported from the cleaning sub-chamber is dried, and in which the cleaning sub-chamber and the drying chamber are spatially separated.
A POD cleaning apparatus comprising:
Dependencies are inferred from the claim text.