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US 12,329,036 B2Granted
Dielectric thin film, dielectric thin film element, piezoelectric actuator, piezoelectric sensor, head assembly, head stack assembly, hard disk drive, printer head and inkjet printer device
AssigneesTDK Corporation, Tokyo Institute of Technology
InventorsYusuke Sato, Mirai Ishida, Wakiko Sato, Hiroshi Funakubo, Takao Shimizu, Miyu Hasegawa, Keisuke Ishihama
Life of this patent
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Abstract
Provided is a dielectric thin film including a metal oxide. The metal oxide includes bismuth, sodium, barium, and titanium, at least a part of the metal oxide is a tetragonal crystal having a perovskite structure, and a (100) plane of at least a part of the tetragonal crystal is oriented in a normal direction of a surface of the dielectric thin film.
Claims20
A dielectric thin film, including:
- a metal oxide,
- wherein the metal oxide includes bismuth, sodium, barium, and titanium,
- at least a part of the metal oxide is a tetragonal crystal having a perovskite structure,
- a (100) plane of the entirety of the tetragonal crystal is oriented in a normal direction of a surface of the dielectric thin film, and
- the metal oxide is expressed by Chemical Formula 1 as follows:
- (1−x)(Bi0.5Na0.5)TiO3-xBaTiO3 (1),
- where x satisfies 0.30≤x≤0.40.
4 more elements
Dependencies are inferred from the claim text.