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US 12,328,110 B2Granted
Microelectromechanical system resonator assembly
AssigneeKYOCERA Technologies Oy
InventorsVille Saarela, Antti Jaakkola, Aarne Oja
Life of this patent
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Abstract
A silicon microelectromechanical system, MEMS, resonator assembly, includes four flexural beam elements forming a rectangular frame, each beam element being connected at an end thereof to an end of a neighboring one of the beam elements. The resonator assembly further includes connection elements for connecting the rectangular frame to at least one mechanical anchor, and the resonator assembly supporting an in-plane flexural collective resonance mode.
Claims16
A silicon microelectromechanical system, MEMS, resonator assembly, comprising:
- four flexural beam elements forming a rectangular frame, each beam element being connected at an end thereof to an end of a neighboring one of the beam elements, the resonator assembly further comprising:
- connection elements for connecting the rectangular frame to at least one mechanical anchor, and the resonator assembly supporting an in-plane flexural collective resonance mode, and
- a meander spring element connecting a respective flexural beam element to its respective mass element.
Dependencies are inferred from the claim text.